Thermal Mass Flow
FC-630High-precision Mass Flow Controller / Meter
The FC-630 is available as a high-precision gas mass flow controller or meter. Direct mass-flow measurement, automatic temperature compensation and multi-protocol communication support demanding gas delivery and test systems.
Technical overview
Published configuration data
Values below describe catalog or typical configurations. The confirmed quotation and model code define the supplied specification.
- Range
- 2 SCCM-6000 SLM
- Accuracy
- ±0.5% F.S.
- Repeatability
- ±0.2% F.S.
- Response
- Below 0.2 s controller / 0.1 s meter
- Pressure rating
- 3 MPa or 10 MPa
- Protocols
- RS232 / RS485 / Modbus / Profibus
Key characteristics
Why engineers consider FC-630
- Controller and meter versions
- Touchscreen display
- Integrated PID control
- Multi-gas selection
Typical applications
Where it fits
- 01Semiconductor gas delivery
- 02Calibration systems
- 03Research equipment
- 04High-precision gas blending
Selection checklist
Confirm these conditions before ordering.
Sending this information helps CurioSens verify the measurement principle, materials, range and interface.
- 01Process medium and composition
- 02Minimum, normal and maximum flow
- 03Operating pressure and temperature
- 04Pipe or tube size and process connection
- 05Required accuracy and response time
- 06Output, power supply and communication interface
Engineer-reviewed FAQ
Questions about FC-630
Application answers reviewed for compatibility, selection, installation and maintenance.
What working pressure drop and control accuracy does the FC-630 high-precision mass flow controller require?+
Engineered for demanding laboratory research and semiconductor gas delivery, the FC-630 mass flow controller covers ranges from 2 SCCM up to 6000 SLM. It achieves high full-scale accuracy of +/-0.5% FS and linearity of +/-0.5% FS, warming up in 30 seconds to reach optimal precision within 5 minutes. The internal proportional valve operates at a working pressure differential of 0.1-0.5 MPa while maintaining a low pressure drop below 0.01 MPa. Base materials are stainless steel with fluororubber, neoprene, or nitrile seals, offering leak tightness of 1x10^-8 Pa.m3/s. Maximum withstand pressure reaches up to 3 MPa or 10 MPa depending on base configuration. Seal compatibility for corrosive gases must be confirmed for the selected configuration. Provide your gas medium, flow range, pressure, temperature, viscosity, tube size, process connection, and required output.
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