Thermal Mass Flow
FS-605Thermal Gas Mass Flow Meter
The FS-605 is a compact thermal gas mass flow meter for low-flow gas measurement. MEMS sensing, rapid response and configurable analog or digital outputs make it suitable for equipment integration and process monitoring where direct mass-flow indication is preferred.

Technical overview
Published configuration data
Values below describe catalog or typical configurations. The confirmed quotation and model code define the supplied specification.
- Typical range
- 0.05-200 L/min
- Accuracy
- ±2.0% F.S.
- Response
- Fast-response configuration
- Interfaces
- RS485 / 4-20 mA options
Key characteristics
Why engineers consider FS-605
- Direct gas mass-flow measurement
- Compact instrument format
- Multi-gas configuration available
- Analog and digital integration options
Typical applications
Where it fits
- 01Laboratory gas delivery
- 02Analyzer and medical-equipment OEM
- 03Purge and carrier gas monitoring
- 04Process gas skids
Selection checklist
Confirm these conditions before ordering.
Sending this information helps CurioSens verify the measurement principle, materials, range and interface.
- 01Process medium and composition
- 02Minimum, normal and maximum measuring range
- 03Operating and sterilization temperature
- 04Operating pressure and pressure peaks
- 05Pipe or tube size and process connection
- 06Required output, power supply and control interface
Engineer-reviewed FAQ
Questions about FS-605
Application answers reviewed for compatibility, selection, installation and maintenance.
Can the FS-605 thermal mass flow meter switch between different gas calibrations in the field?+
The FS-605 thermal gas mass flow meter is designed for flexible multi-gas monitoring across analytical and industrial equipment. It supports selectable internal gas curves for air, N2, O2, Ar, and CO2, covering flow full-scales from 0-0.1 L/min up to 0-200 L/min (0-12 m3/h). It delivers linear voltage (1-5V), current (4-20mA), or digital RS485 Modbus RTU outputs with a response time under 10 ms. Operating pressure is rated up to 1 MPa. Accuracy is <= +/-2.0% FS with zero drift <= 0.5% FS. However, non-standard gas mixtures must be confirmed for the selected configuration. Please submit your gas medium, flow range, pressure, temperature, viscosity, tube size, process connection, and required output.
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