Thermal Mass Flow
FS-610Thermal Gas Mass Flow Meter
The FS-610 is a compact MEMS thermal gas mass flow meter with adjustable display orientation, 1:100 turndown and Modbus communication. It supports common process gases and multiple threaded connections.

Technical overview
Published configuration data
Values below describe catalog or typical configurations. The confirmed quotation and model code define the supplied specification.
- Flow coverage
- 0.5-1200 L/min standard options
- Turndown
- 1:100
- Pressure
- Up to 1.0 MPa
- Temperature
- -10 to 55°C
- Output
- 4-20 mA
- Communication
- RS485 Modbus RTU
Key characteristics
Why engineers consider FS-610
- MEMS thermal sensing
- Adjustable display direction
- Multiple threaded connections
- Fast dynamic response
Typical applications
Where it fits
- 01Industrial gas monitoring
- 02Purge systems
- 03Laboratory utilities
- 04Equipment integration
Selection checklist
Confirm these conditions before ordering.
Sending this information helps CurioSens verify the measurement principle, materials, range and interface.
- 01Process medium and composition
- 02Minimum, normal and maximum flow
- 03Operating pressure and temperature
- 04Pipe or tube size and process connection
- 05Required accuracy and response time
- 06Output, power supply and communication interface
Engineer-reviewed FAQ
Questions about FS-610
Application answers reviewed for compatibility, selection, installation and maintenance.
What information is needed to configure the FS-610?+
Provide the medium, complete operating range, pressure, temperature, connection, output and installation conditions. State the exact gas or mixture and its reference conditions so the correct calibration can be selected.
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