Industry application guide
Semiconductor & Electronics
Non-invasive flow and high-purity water analysis for wet benches, chemical delivery and UPW systems.
Process challenges
What the measurement must withstand.
- 01Avoiding contamination of high-purity chemicals
- 02Measuring small flows in plastic tubing
- 03Monitoring ultrapure-water quality
- 04Integrating compact sensors into OEM equipment
Recommended starting points
Products to evaluate.
- FS-930 clamp-on ultrasonic flow meter
- FS-910 inline ultrasonic flow meter
- AS7000 pure-water conductivity sensor
- B Series DIN-rail transmitter
Application brief
Four questions to answer first.
These answers let our technical team narrow the principle and configuration before discussing price.
- 01What is the tube material, OD and wall thickness?
- 02Does the liquid contain bubbles or particles?
- 03What is the required minimum flow?
- 04Which cleanliness and wetted-material restrictions apply?
Industry FAQ
Engineer-reviewed application answer.
What liquid flow meters and conductivity sensors are recommended for semiconductor chemical delivery?+
Semiconductor wet bench processing and chemical delivery systems require ultra-clean, corrosion-resistant measurement tools. The FS-910 inline ultrasonic flow meter provides non-contact micro-flow measurement in UPVC pipe lines down to 120 ml/min without moving parts. For ultrapure water (UPW) loop monitoring, the AS7000 2-pole stainless steel conductivity sensor provides +/-1% accuracy down to 0.01 uS/cm resolution with sanitary Tri-Clamp connections. For bulk conductive chemical lines, the FS-510 electromagnetic flow meter features a PEEK lining and 316L electrodes rated up to 6.3 MPa. High-purity PFA chemical compatibility must be confirmed for the selected configuration. Share your medium, flow range, pressure, temperature, viscosity, tube size, process connection, and required output for sizing.
selectionRelevant products
Review the technical details.
FS-910Inline Ultrasonic Flow Meter
High-resolution transit-time measurement for clean liquids in small tubes.
FS-930Clamp-on Ultrasonic Flow Meter
Non-invasive measurement through the tube wall for clean, high-purity or corrosive liquids.
B SeriesDIN Rail Analysis Transmitter
Space-saving liquid-analysis transmitter for PLC and automation cabinets.
AS7000Pure Water Conductivity Sensor
Two-electrode stainless-steel conductivity sensor for pure and hygienic water systems.